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200mm SMIF Pod Opener with Integrated Cassette Transfer Robots Home>Products> 200mm Wafer SMIF  
 
PLUS-500SX-X


  • Designed for tools that fail to meet SEMI E-15 standards
  • PLUS-500-SX-X models are for tools with a narrow cassette pitch
  • The arm can move to Left or Right 80mm ro meet the requirement of narrow stage pitch
  • The minimun width of tool windowing opening down to 310mm
  • The mininum pitch of 2 stages down to 240mm (for 2 stages)
  • The arm reach 390mm
  • PLUS-500-SX-X type information
    • SX: Slide option - View from operator side, first letter S mean standard arm. secondary letter X mean movind direction of slider. Its meaning is
      • R: Right Hand(Slider move to left)
      • L: Left Hand(Slider move to right)
    • X: Utility Side - View from operator side
      • R: Right hand side
      • L: Left Hand Sie

 
 
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