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200mm Wafer SMIF
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200mm SMIF Pod Opener with Integrated Cassette Transfer Robots Home>Products> 200mm Wafer SMIF  

  • Designed for tools with narrow windows AND angled stages
  • The minimum width of window opening down to 240mm
  • Any cassette stage orientation 0 to 360 degrees
  • Reduce the cost and time of tool chamber modifications
  • 295mm arm reach
  • PLUS-500-R-X Type information
    • R: totation type
    • X: Utility Side - View from operator side
      • R - Right Hand Side
      • L - Left Hand Side

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