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200mm SMIF Pod Opener with Integrated Cassette Transfer Robots Home>Products> 200mm Wafer SMIF  
 
PLUS-500 Installation information
This installation is only for reference

Certified EQ Practical PLUS model on EQ
AMAT-CENTURA(Narrow Body) PLUS 500 R-X 
1.CENTURA-HDP   
2.CENTURA-RTP   
3.CENTURA-SA   
4.CENTURA-Wxz   
5.CENTURA-DPS   
6.HDP-CVD ULTIMA   
7.W-CVD CENTURA 5200   
8.CENTURA RTP RADIANCE   
   
AMAT-ENDURA (Wide Body) PLUS 500 R-X 
1.ENDURA VHP   
2.ENDURA 5500 HP PVD   
3.ENDURA 5500 HP ILB   
4.ENDURA ILB   
5.ENDURA PVD BARRIER   
   
AMAT P5000 PLUS 500 R-X 
   
AXCELIS-ULTRA 7.0 PLUS 500 S-X 
AXCELIS NV-GSD-80 PLUS 500 S-X 
AXCELIS-UV CURE  PLUS 500 CX 
AXCELIS-GSD-HE PLUS 500 SX 
   
ANELVA I-1060 SVII 4X PLUS 500 S-X ,SX-X 
ANELVA ILD-4100SR PLUS 500 S-X 
   
ASM EAGLE-10 PLUS 500 S-X
   
CANON MAS-8000 PLUS 500 R-X 
CANON MAS-8200 PLUS 500 R-X 
CANON MAS-8220 PLUS 500 S-X 
CANON HP-8800 PLUS 500 R-X 
   
DNS SS-W80A PLUS 500 S-X,SX-X 
DNS SR-2000 PLUS 500 S-X,SX-X 
DNS SK-200W-AVP PLUS 500 S-X,SX-X
DNS SS-80BW-AR PLUS 500 S-X,SX-X 
DNS FC-821L  PLUS 500 S-X,SX-X
DNS WET BENCH PLUS 500 S-X
   
GSI LUMONICS PLUS 500 S-X
   
HITACHI-M602 PLUS 500 S-X,SX-X 
HITACHI S-9220 PLUS 500 R-X 
HITACHI CD SEM-S 9200S PLUS 500 S-X,SX-X 
   
JEOL JWS-7555 PLUS 500 S-X 
   
KAIJO RT-10  
KAIJO RT-1035T PLUS 500 S-X,SX-X 
KAIJO RT-1041T PLUS 500 S-X,SX-X 
KAIJO RT-1045T PLUS 500 S-X,SX-X 
KAIJO RT-574 PLUS 500 S-X,SX-X 
KAIJO RT-575 PLUS 500 S-X,SX-X 
   
KLA-TENCOR 5100 PLUS 500 S-X,SX-X 
KLA-TENCOR ARCHER 10 PLUS 500 R-X 
KLA-TENCOR HRP-240 PLUS 500 S-X 
KLA-TENCOR UV-1080 PLUS 500 S-X 
   
KOKUSAI TOOL PLUS 500 CX-X 
1.VERTEX-Ⅲ   
2.VERTEX-Ⅲ(S)   
3.DD-853V   
4.DJ-853V   
5.DJ-825V   
   
LAM-4400 PLUS 500 SX,CX-X 
LAM-Alliance TCP9608PTX2ch PLUS 500 R-X 
LAM-TCP-9408SE PLUS 500 S-X.SX-X 
   
LEICA INS-2000 PLUS 500 R-X 
   
Mattson ASPEN-II ICP ,ASPEN-II ICP-2ch PLUS 500 SX (cassette:rev) 
   
NIKON OPTI-5A+PLUS 500 S-X  PLUS 500 S-X
   
NISSIN EXCEED 2000AH PLUS 500 S-X 
   
NOVELLUS-Concept 2 PLUS 500 S-X 
NOVELLUS-Concept ONE PLUS 500 S-X 
NOVELLUS-PEP IRIDIA PLUS 500 S-X 
   
SEN NV_MC3 PLUS 500 S-X 
SEN NV-GSD-III LE PLUS 500 S-X 
SEN GSD-III 180 PLUS 500 S-X 
SEZ SEZ203 PLUS 500 R-X 
   
STEAG AST-2800 PLUS 500 S-X 
   
TEL-ALPHA-8 PLUS 500 CX-X 
1: ALPHA-8(FTP)   
2:ALPHA-8(FTPS)   
3:ALPHA-808SD   
4:ALPHA-858SC   
5:ALPHA-858SD   
6:ALPHA-8   
7:ALPHA-8S   
8:ALPHA-8C   
9:ASPHA-8SE-ZAABF   
10:ALPHA-8SE-ZABF   
11:ALPHA-8SE-ZA   
12:ALPHA-8SE-ZA   
   
TEL MARK 8 PLUS 500 S-X,SX-X 
   
TEL SS4 PLUS 500 S-X,SX-X 
   
TEL ACT-8 PLUS 500 S-X,SX-X 
   
TEL TE8401 PLUS 500 S-X,SX-X 
TEL TE-8500S PLUS 500 S-X,SX-X 
   
TEL TE-UNITY85DI PLUS 500 S-X 
2.UNITY85SCCM  
3.UNITY-85DD  
4.UNITY Ver 2 85DI  
   
TEL UW-200Z, UW-200Z 6bath PLUS 500 S-X,SX-X 
TEL UW-8000 PLUS 500 S-X 
   
TYK PLUS 500 S-X,SX-X 
   
USHIO UMA-1002-HC93JF PLUS 500 S-X, PLUS 500 R-X 
   
VARIAN KESTROL 750 PLUS 500  
VARIAN EHP220 PLUS 500 S-X 
   
WJ WJ-999R CVD PLUS 500 S-X 
WJ WJ-999 PLUS 500 S-X  
 
 
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