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200mm SMIF Pod Opener with Integrated Cassette Transfer Robots Home>Products> 200mm Wafer SMIF  

  • Designed for tools with narrow windows AND height limitation of Chamber 
  • The minimum width of window opening down to 240mm and Clearance height of chamber down to 280mm, PLUS-500-SD-S can load/unload cassette onto Tool's chamber
  • Reduce the cost and time of tool chamber modifications
  • 390mm arm reach
  • PLUS-500-SD-X Type information
    • SD: Arm compact design
    • X: Utility Side - View from operator side
      • R - Right Hand Side
      • L - Left Hand Side

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