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200mm SMIF Pod Opener with Integrated Cassette Transfer Robots Home>Products> 200mm Wafer SMIF  


  • Designed for tools that fail to meet SEMI E-15 standards
  • With 1507mm height,PLUS-500-CX-Xmodels can connect to process tool without blocking operation panel or monitor screen right above the loadports
  • With extra  80mm lateral moving  to left or right by slider, PLUS-500-CX-X are specially for narrow cassette pitch.
  • due to above 2 features, PLUS-500-CX-X  are specially for tools with a narrow cassette pitch and limited height space, like as TEL Alpha-8
  • the minimun width of tool windowing opening down to 310mm
  • The mininum pitch of 2 stages down to 240mm (for 2 stages)
  • The arm reach 390mm
  • PLUS-500-CX-X type information
    • CX: Slide option - View from operator side, first letter C mean compact design. secondary letter X mean movind direction of slider. Its meaning is
      • R: Right Hand(Slider move to left)
      • L: Left Hand(Slider move to right)
    • X: Utility Side - View from operator side
      • R: Right hand side
      • L: Left Hand Sie


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