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Lamina-II series EFEM/Sorter, Reticel Handling Systems Home>Products> Reticle Storage and Handling Systems 
Lamina-II series EFEM/Sorter

  • Fully automated reticle transfer systems
  • Better than ISO Class 2 cleanliness
  • SEMI E78 ESD “Level 1” standard
  • Load port options: 150mm and 200mm RSP, ASML, Nikon, Cannon, HOYA, Toppan, DNP, TMC, ShinEtsu, DMS, and more
  • Other options: BCR/OCR reader, IR, RFID reader/writer, Turntable, SECS/GEM Interface
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