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eRack and N2 Chamber Home>Products> Reticle Storage and Handling Systems 
 
N2 Chamber with Charger

  • Integrated ID tracing system
  • Win XP embed system
  • ·PIP detecting system
  • Pod N2 charging Modular
  • Programmable Charging system
  • Management software
  • SECS I/SECS II and TCP/IP
  • NH4+ < 2ppb in chamber
  • Access or SQL data base (optional)
  • Air tank (Optional)
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