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PLUS-150T/500T Reticle Pod Loader/Unloader Home>Products> Reticle Storage and Handling Systems 
150mm/200mm Reticle SMIF Pod Loader/Unloader PLUS-150T/PLUS-500T

  • Class-1 Cleanliness
  • Supports 150mm SRP and 200mm RSP
  • 0-300 Reticle Tilt
  • 0-300 Reticle Rotation
  • Options:RFID Reader/Writer,IR Reader/Writer,OCR/BCR
  • CE, S2, S8
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