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Reticle Pod Opener Home>Products> Reticle Storage and Handling Systems 
 
POS 200 - 200mm Reticle SMIF Pod Opener

 

 

  • Fortrend POS-200r is a simple, reliable pod opener designed to open 200mm Reticle SMIF pods by lifting the shell.  After Pod Shell lift, operator can pick Reticle out. 
  • Untra compact design and can almost be placed on any table.
  • An integrated reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding Reticles. 
  • Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools
  • Communication: Parallel, Series
      • Optional SECS/GEM
  • Barcode reader for Mask ID reading(Optional)
  • Copmarison of Pod ID and Mask ID(Option)

 


 
 
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