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Reticle Pod Opener Home>Products> Reticle Storage and Handling Systems 
POS 150-G3 for Reticle SMIF Pod Opener

  • Fortrend POS 150-G3 is a simple, reliable Reticle SMIF Pod opener designed to open 150mm Reticle SMIF pods by lifting the shell.  After Pod Shell lift, operator can pick reticle out by gripper.
  • Untra compact design and can almost be placed on any table.
  • An integrated bumping sensor to keep the safty of operator and reticle.
  • An integrated reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding reticles. 
  • Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools
  • Communication:  RS-232  SECS I/II
  • ID device: RFID or IR-Link
  • Barcode reader for Mask ID readding(Option)
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