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SMIF Reticle Automation SORTER/EFEM STOCKER AMR Core Components
PLUS 150S-X/PLUS 500S-X
Straight arm Movement Loads cassette to tool...
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PLUS 150CR-R/PLUS 500CR-R
• Straight arm Movement/• Loads cassette to t...
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PLUS 150CL-L/PLUS 500CL-L
Compact Body//Straight arm Movement//Loads ca...
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PLUS 150R-X/PLUS 500R-X
Straight arm Movement with cassette able to r...
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PLUS 150SD-X/PLUS 500SD-X
Straight arm Movement//Loads cassette to tool...
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PLUS 150UX/PLUS 500UX
Less than 90-second cycle time maximizes prod...
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PLM 200W
Fortrend PLM-200W is a simple, reliable pod o...
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PLUS 500F
Small footprint saves valuable FAB floor spac...
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PLM 150Rx
ISO Class 1 cleanliness with active self-clea...
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PLM 200Rx
Small footprint saves valuable FAB floor spac...
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PLM EUV Dual
ISO Class 1 cleanliness with active self-clea...
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PLUS 150 G4
Integrated RSP 150 SMIF opener with reticle h...
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PLUS 500 G4
Integrated RSP 200 SMIF opener with reticle h...
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POM 150R
An automated SMIF pod opener designed to open...
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POM 200R
An automated SMIF pod opener designed to open...
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Lamina 202
Fortrend offers a range of EUV & 193 Reticle ...
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Lamina 203
Fortrend offers a range of EUV & 193 Reticle ...
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Lamina 204
Fortrend offers a range of EUV & 193 Reticle ...
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Lamina 206
Fortrend offers a range of EUV & 193 Reticle ...
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Lamina 205
Fortrend offers a range of EUV & 193 Reticle ...
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Lamina Series 150mm Sorter
Fortrend has provided Lamina series wafer EFE...
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Lamina Series 200mm Sorter
Fortrend has provided Lamina series wafer EFE...
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Lamina Series 300mm Sorter
Fortrend has provided Lamina series wafer Sso...
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200mm-300mm Stocker
Stocker is composed of standard storage frame...
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200mm-300mm AMR
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Dual Arms Scara Robot
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Turn Flip Robot
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300mm Lord Port
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Pre-Aligner
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2-3 Step Telescopic Robot
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Flip Pre-Aligner
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Single Arm Scara Robot
Transfer 50-450mm Wafer（2~18’’）//Clean room A...
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COMPANY PROFILE
Founded in 1979 in Silicon Valley, USA, Fortrend has always been the industry expert in batch wafer transfer technologies, Standard Mechanical Interface (SMIF) technologies, ultra-clean automation solutions, and wafer surface curing processes for the semiconductor and PV industries. Fortrend SMIF products have become the crucial automation connections between process equipment and the factory delivery system and between different processing equipment. Fortrend's standard 200mm and 300mm front end automation modules are readily integrated into processing tools reliably and cost effectively. Fortrend's 3DIC thermal curing tools set the industrial standards for wafer surface curing processes. Fortrend offers not only standard automation and thermal curing modules, but also custom solutions allowing us to meet custom challenges and difficult configuration   requirements quickly with a minimum of expenses. Contact Fortrend and experience our engineering excellence firsthand.
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