4-AXIS CONTACT BERNOULLI SINGLE ARM FLIP ROBOT-FORTREND

This robot arm is suitable for material handling in high-cleanliness conditions. It employs a closed-loop control method and is designed for applications where the end-effector (EEF) needs to be rotated. It is used for high-speed transportation of semiconductor wafers in atmospheric environments and is applicable to various semiconductor equipment, including Equipment Front End Modules (EFEMs), sorters, coating and developing machines, cleaning devices, and inspection equipment.

· The EEF (End-Effector) can achieve a rotation of 0–180°.

· Handling weight: Based on the third joint of the arm, the weight should be under 3 kg.

· It can be equipped with different types of Forks to meet the wafer transportation requirements of various working conditions.

· Wafer holding methods: Vacuum suction type/Clamping type/Contact Bernoulli type/Non-contact Bernoulli type.

· Depending on the equipment layout, the upper fixing method or the lower fixing method can be selected.

Product Specifications

Handling Items	3"/4"/6"/8"/12" Wafers
Movable Range (Arm Travel Distance)	Arm	Theta Rotation	Lifting:
	290/376mm	340°	300/400/500
Transfer Speed （Average Speed）	500mm/S	340°/S	500mm/S
Arm Type	Dual Arms
Handling Height	700-800mm
Repeatability Accuracy	Within ±0.1mm
Communication Protocol	HEX/ASCII
Communication Method	EtherNet/RS232
Cleanliness	Highest ISO Class 1
Facility Requirements	Power: 220V, 10A Vacuum: -70~-90Kpa Positive Pressure: 0.1~0.5Mpa

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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